The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2009
Filed:
Jul. 11, 2005
Paul Douglas Macdonald, Tracy, CA (US);
Michiel V. P. Krüger, Berkeley, CA (US);
Michael Welch, Livermore, CA (US);
Mason L. Freed, Pleasant Hill, CA (US);
Costas J. Spanos, Lafayette, CA (US);
Paul Douglas MacDonald, Tracy, CA (US);
Michiel V. P. Krüger, Berkeley, CA (US);
Michael Welch, Livermore, CA (US);
Mason L. Freed, Pleasant Hill, CA (US);
Costas J. Spanos, Lafayette, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
One aspect of the present invention is a method of monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. Another aspect of the present invention is a system configured for monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. One embodiment of the present invention includes a software program that can be implemented in a computer for optimizing the performance of a process tool for processing a workpiece.