The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2009
Filed:
Sep. 29, 2006
Alan G. Lewis, Sunnyvale, CA (US);
Manish Kothari, Cupertino, CA (US);
John Batey, Cupertino, CA (US);
Teruo Sasagawa, Los Gatos, CA (US);
Ming-hau Tung, San Francisco, CA (US);
Gregory D. U'ren, Berkeley, CA (US);
Stephen Zee, San Jose, CA (US);
Alan G. Lewis, Sunnyvale, CA (US);
Manish Kothari, Cupertino, CA (US);
John Batey, Cupertino, CA (US);
Teruo Sasagawa, Los Gatos, CA (US);
Ming-Hau Tung, San Francisco, CA (US);
Gregory D. U'Ren, Berkeley, CA (US);
Stephen Zee, San Jose, CA (US);
Qualcomm Mems Technologies, Inc., San Diego, CA (US);
Abstract
A microelectromechanical systems device having an electrical interconnect between circuitry outside the device and at least one of an electrode and a movable layer within the device. At least a portion of the electrical interconnect is formed from the same material as a conductive layer between the electrode and a mechanical layer of the device. In an embodiment, this conductive layer is a sacrificial layer that is subsequently removed to form a cavity between the electrode and the movable layer. The sacrificial layer is preferably formed of molybdenum, doped silicon, tungsten, or titanium. According to another embodiment, the conductive layer is a movable reflective layer that preferably comprises aluminum.