The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2009
Filed:
Nov. 21, 2007
Jörg Kiesewetter, Thiendorf OT Sacka, DE;
Stefan Kreissig, Venusberg, DE;
Stojan Kanev, Thiendorf OT Sacka, DE;
Claus Dietrich, Thiendorf OT Sacka, DE;
Jörg Kiesewetter, Thiendorf OT Sacka, DE;
Stefan Kreissig, Venusberg, DE;
Stojan Kanev, Thiendorf OT Sacka, DE;
Claus Dietrich, Thiendorf OT Sacka, DE;
SUSS MicroTec Test Systems GmbH, Sacka, DE;
Abstract
A prober is described that is suitable for testing of semiconductor substrates under atmospheric conditions that deviate from ambient conditions. The prober includes a chuck for mounting of a semiconductor substrate and a probe holder for mounting of test tips for electrical contacting of the semiconductor substrate. The semiconductor substrate and test tips are arranged within a housing sealed relative to the surrounding atmosphere. The housing comprises two housing parts joined with a seal. The seal can be inflated with two different pressures and is less deformable at higher pressure. For testing of the semiconductor substrate, coarse positioning of the semiconductor substrate relative to the test tips occurs under atmospheric conditions and then fine positioning with the sealed housing and deformable seal before the lower deformability of the seal is produced at higher pressure in the seal and the semiconductor substrate is contacted by the test tips and tested.