The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2009
Filed:
Apr. 17, 2005
Anthony Mathius Tieben, Jordan, MN (US);
John Lystad, Bloomington, MN (US);
Anthony Mathius Tieben, Jordan, MN (US);
John Lystad, Bloomington, MN (US);
Entegris, Inc., Chaska, MN (US);
Abstract
A wafer container including an enclosure portion with a door frame defining an opening for insertion and removal of wafers and a door fittable in the door frame to seal the enclosure portion. A continuous elastomeric seal extends around the door inward of the periphery. The seal is positioned on a sealing surface proximate the perimeter of the door and may be partially inset in a radial groove in the door. In cross-section, the elastomeric seal has an inset portion and a sealing head coupled by a bridging portion. The sealing head has a foot portion projecting from the bridging portion toward the sealing surface of the door, and a head portion extending in a direction generally opposite the foot relative to the bridging portion. The door frame has a seal engaging structure so that when the door is seated in the door frame, the bridging portion of the elastomeric seal contacts the seal engaging structure displacing the bridging portion axially toward the sealing surface and causing the head of the sealing head to rotate radially and contact the seal engaging structure. The displacement action also affirmatively sets the foot of the sealing head in contact with the sealing surface of the door.