The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2009
Filed:
Jul. 06, 2005
Harmen Klaas Van Der Schoot, Vught, NL;
Hernes Jacobs, Eindhoven, NL;
Bernardus Antonius Johannes Luttikhuis, Nuenen, NL;
Petrus Matthijs Henricus Vosters, Bladel, NL;
Johannes Martinus Andreas Hazenberg, Veldhoven, NL;
Aart Adrianus Van Beuzekom, Eindhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Hernes Jacobs, Eindhoven, NL;
Bernardus Antonius Johannes Luttikhuis, Nuenen, NL;
Petrus Matthijs Henricus Vosters, Bladel, NL;
Johannes Martinus Andreas Hazenberg, Veldhoven, NL;
Aart Adrianus Van Beuzekom, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Embodiments of the invention relates to a substrate handler for handling a substrate, including a conditioning device for conditioning the substrate. In an embodiment, the substrate handler includes a displacing device configured to displace the substrate in a direction substantially parallel to the support surface, wherein the displacing device is configured to displace the substrate during the conditioning process from one conditioning position to one or more other conditioning positions. According to another embodiment of the invention, the substrate handler includes a float device for providing an air bed above a support surface of the substrate handler, the substrate handler being configured to support the substrate on an air bed during conditioning of the substrate.