The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2009
Filed:
Jun. 14, 2004
Yoshiaki Tanase, San Jose, CA (US);
Billy C. Leung, Sunnyvale, CA (US);
Gregory S. Lewis, Mountain View, CA (US);
David E. Berkstresser, Los Gatos, CA (US);
Yoshiaki Tanase, San Jose, CA (US);
Billy C. Leung, Sunnyvale, CA (US);
Gregory S. Lewis, Mountain View, CA (US);
David E. Berkstresser, Los Gatos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member having a convex sealing face and a backside. In another embodiment, a chamber having an apparatus for sealing a substrate transfer passage is provided that includes a chamber body having an interior volume, at least one substrate access defined through the chamber body configured to allow passage of a large area substrate therethrough, and a door member having a convex sealing face moveable between a first position that covers the substrate transfer port and a second position clear of the substrate transfer port. In yet another embodiment, the chamber body may be a load lock chamber.