The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 18, 2009

Filed:

Jun. 03, 2003
Applicants:

Thierry Léon Lagarde, Vif, FR;

Ana Lacoste, St Martin le Vinoux, FR;

Jacques Pelletier, St Martin D'Heres, FR;

Yves Alban-marie Arnal, Poisat, FR;

Inventors:

Thierry Léon Lagarde, Vif, FR;

Ana Lacoste, St Martin le Vinoux, FR;

Jacques Pelletier, St Martin D'Heres, FR;

Yves Alban-Marie Arnal, Poisat, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention relates to a device for the production of a plasma () within a housing comprising means for the generation of energy in the microwave spectrum, for the excitation of the plasma, said means comprise at least one basic plasma excitation device with a coaxial applicator () of microwave energy, one of the ends of which is connected to a production source () of microwave energy, the other end () of which is directed to the gas to be excited within the housing. The device is characterised in that each basic plasma excitation device is arranged in the wall () of the housing, each applicator () having a central core () which is essentially flush with the wall of the housing. The central core and the thickness of the wall () of the housing are separated by a space () coaxial to the central core, said space being totally filled, at least at the end of each applicator, by a dielectric material (), such that said material is essentially flush with the level of the wall of the housing.


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