The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2009
Filed:
Feb. 16, 2007
Alan Wong, San Jose, CA (US);
Jeff Drautz, Rio Rancho, NM (US);
Joseph D. Shindler, Gaston, OR (US);
Max Lau, San Ramon, CA (US);
George Chen, Los Gatos, CA (US);
Alan Wong, San Jose, CA (US);
Jeff Drautz, Rio Rancho, NM (US);
Joseph D. Shindler, Gaston, OR (US);
Max Lau, San Ramon, CA (US);
George Chen, Los Gatos, CA (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
The present invention describes a method including: determining field-clustering scheme; selecting initial sample plan; establishing initial model of overlay, the initial model of overlay comprising components; and establishing efficient model of overlay from the initial model of overlay including: constructing matrices; identifying redundant components and eliminating the redundant components; and identifying highly-correlated components and determining whether to eliminate the highly-correlated components.