The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2009
Filed:
Jul. 14, 2004
Yoshiaki Ohbayashi, Nara, JP;
Mamoru Yasuda, Kobe, JP;
Shinichi Saeki, Kashiwara, JP;
Masatsugu Komai, Nishinomiya, JP;
Kenichi Kagawa, Kawasaki, JP;
Yoshiaki Ohbayashi, Nara, JP;
Mamoru Yasuda, Kobe, JP;
Shinichi Saeki, Kashiwara, JP;
Masatsugu Komai, Nishinomiya, JP;
Kenichi Kagawa, Kawasaki, JP;
Hosiden Corporation, Osaka, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A sound detecting mechanism capable of forming a diaphragm and a back electrode on a substrate by a simple process includes acoustic holes corresponding to perforations formed on a front surface of a substrate. A second protective film, a sacrificial layer and a metal film are laminated on the front surface in a portion corresponding to the acoustic holes. The substrate is etched from the back surface thereof to a depth reaching the acoustic holes to form an acoustic opening. Subsequently, by effecting an etching from the back surface of the substrate through the acoustic holes, the sacrificial layer is removed and a void area is formed between the diaphragm made of the metal film, the substrate and the formed perforations. The sacrificial layer that remains after the etching is used as a spacer for maintaining a gap between the back electrode and the diaphragm.