The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7566883 B1

PDF
Full Text
Expired
Date of Patent:
Jul. 28, 2009

Filed:

Jan. 12, 2007
Applicants:

David M. Burtner, Belmont, MA (US);

Scott A. Townsend, Fort Collins, CO (US);

Daniel E. Siegfried, Fort Collins, CO (US);

Inventors:

David M. Burtner, Belmont, MA (US);

Scott A. Townsend, Fort Collins, CO (US);

Daniel E. Siegfried, Fort Collins, CO (US);

Assignee:

Veeco Instruments, Inc., Fort Collins, CO (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/10 (2006.01); H01J 37/08 (2006.01); H01J 7/24 (2006.01);
U.S. Cl.
CPC ...
Abstract

One or more thermal transfer sheets are easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal transfer sheets, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal transfer sheets may be interposed between the consumable components within the anode assembly. The thermal transfer sheets may be thermally conductive and either electrically insulating or conductive.


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