The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2009
Filed:
Aug. 20, 2004
Applicants:
Christian Zengerling, Mühlhausen, DE;
Armin Schoeppach, Aalen, DE;
Ulrich Weber, Ulm, DE;
Inventors:
Assignee:
Carl Zeiss SMT AG, , DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a device for preventing the creeping of an optical element, in particular a lens or a mirror, the optical element is connected to a mount via connecting members arranged on the circumference of the optical element. The position of the optical element in an objective (PL) deviates from the vertical axial position. In order to compensate the dead weight at least of the optical element at least one holding element via which the optical element is held on a housing part of the objective (PL) is provided in addition to the connecting members.