The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2009
Filed:
Dec. 27, 2005
Keith Frank Best, Best, NL;
Geoffrey Norman Phillipps, Luyksgestel, NL;
Franciscus Godefridus Casper Bijnen, Valkenswaard, NL;
Enno Van Den Brink, Eindhoven, NL;
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
Joseph J. Consolini, Costa Mesa, CA (US);
Peter Ten Berge, Eindhoven, NL;
Keith Frank Best, Best, NL;
Geoffrey Norman Phillipps, Luyksgestel, NL;
Franciscus Godefridus Casper Bijnen, Valkenswaard, NL;
Enno Van Den Brink, Eindhoven, NL;
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
Joseph J. Consolini, Costa Mesa, CA (US);
Peter Ten Berge, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A substrate bonding system has a first and a second substrate table for holding a first substrate and a second substrate, respectively, and a controller. The first substrate includes a first device having first contact pads and the second substrate a second device having second contact pads. The wafer bonding system is arranged to bond the first and second device in such a way that a circuit may be formed by the first and second device. The first and second substrate tables each include a position sensor arranged to measure an optical signal generated on an alignment marker of the first and second substrate, respectively. The first and second substrate tables include a first and second actuator respectively that is arranged to alter a position and orientation of the respective substrate table.