The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2009
Filed:
Jul. 14, 2008
William Clay Schluchter, Los Altos, CA (US);
Miao Zhu, San Jose, CA (US);
Alan B. Ray, Palo Alto, CA (US);
Gerry Owen, Palo Alto, CA (US);
Carol Courville, San Jose, CA (US);
William Clay Schluchter, Los Altos, CA (US);
Miao Zhu, San Jose, CA (US);
Alan B. Ray, Palo Alto, CA (US);
Gerry Owen, Palo Alto, CA (US);
Carol Courville, San Jose, CA (US);
Agilent Technologies, Inc., Santa Clara, CA (US);
Abstract
A sensor head for use with a measurement grating is described. The sensor head comprises: a splitter grating configured to split a light beam into first and second measurement beams; a first retroreflector configured to retroreflect the first and second measurement beams toward the measurement grating; and a second retroreflector configured to retroreflect the first and second measurement beams toward the measurement grating. In one embodiment the second measurement beam is diffracted by the measurement grating to form first and second sub-beams and one of the first and second sub-beams comprises a zeroth order diffraction component and a first order diffraction component. In another embodiment, the first and second sub-beams each comprise a zeroth order diffraction component and a first order diffraction component.