The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2009
Filed:
Feb. 13, 2007
Hans-jurgen Fleischer, Priestewitz, DE;
Axel Schmidt, Stolpchen, DE;
Stojan Kanev, Sacka, DE;
Axel Becker, Dresden, DE;
Hans-Jurgen Fleischer, Priestewitz, DE;
Axel Schmidt, Stolpchen, DE;
Stojan Kanev, Sacka, DE;
Axel Becker, Dresden, DE;
SUSS MicroTec Test Systems GmbH, Sacka, DE;
Abstract
To arrange a probe needle in a reproducible manner, ensure reliable contact-connection of the probe needle and ensure that the probe needle is held securely even at high temperatures or test forces, a probe receptacle is provided for mounting a probe for testing semiconductor components. The probe has a probe needle and an essentially prismatic probe shaft. The probe receptacle comprises a base having a socket opening to receive the prismatic probe shaft, surrounded by a base wall. The base wall comprises at least two base wall segments which can be moved toward one another. A probe holder arm having such a probe receptacle, and test apparatus having at least one probe which has such a probe receptacle are also provided.