The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2009

Filed:

Jul. 02, 2007
Applicants:

David A. Soltz, San Jose, CA (US);

YE Yang, Fremont, CA (US);

Mark C. Lin, San Jose, CA (US);

Laurence S. Horndon, Santa Clara, CA (US);

Edward G. Solomon, Menlo Park, CA (US);

Joseph A. Heanue, Palo Alto, CA (US);

John F. Heanue, Manchester, MA (US);

M. Nasser Ghodsi, Hamilton, MA (US);

Inventors:

David A. Soltz, San Jose, CA (US);

Ye Yang, Fremont, CA (US);

Mark C. Lin, San Jose, CA (US);

Laurence S. Horndon, Santa Clara, CA (US);

Edward G. Solomon, Menlo Park, CA (US);

Joseph A. Heanue, Palo Alto, CA (US);

John F. Heanue, Manchester, MA (US);

M. Nasser Ghodsi, Hamilton, MA (US);

Assignee:

KLA-Tencor Corporation, Milpitas, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
Abstract

A signal conduction channel having a first element that receives electrons at a first end from a vacuum environment, produces photons as the electrons are received, and propagates the photons along a length of the first element to a distal second end, and a second element that receives the photons from the second end of the first element, converts the photons to electrons, and multiplies the electrons, where no additional element is disposed between the second end of the first element and the second element, except optionally at least one of a photon-conductive epoxy, a lens, and an optical coupling plate that touches both the second end of the first element and the second element.


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