The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2009
Filed:
Mar. 12, 2007
Alexander J. Gubbens, Redwood City, CA (US);
Alexander J. Gubbens, Redwood City, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
One embodiment relates to a high-resolution Auger electron spectrometer in a scanning electron beam apparatus. An electron source generates a primary electron beam, and an immersion objective lens is configured to focus the primary electron beam onto a surface of a target substrate. A Wien filter is configured within the immersion objective lens and to deflect and disperse secondary electrons from the surface. A position sensitive detector is configured to receive the secondary electrons so as to detect an Auger electron spectrum. A first electron-optical lens may be positioned after the Wien filter so as to transfer a minimal-dispersion plane to an aperture plane. A second electron-optical lens may be positioned after the aperture so as to transfer a virtual focused-spectrum plane to a detector plane. Other embodiments, aspects and features are also disclosed.