The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2009
Filed:
Dec. 17, 2005
Bruce Baran, Lexington, MA (US);
Chris L. Koliopoulos, Tucson, AZ (US);
Songping Gao, Southborough, MA (US);
Richard Earl Bills, Tucson, AZ (US);
Michael Murphree, North Attleboro, MA (US);
Bruce Baran, Lexington, MA (US);
Chris L. Koliopoulos, Tucson, AZ (US);
Songping Gao, Southborough, MA (US);
Richard Earl Bills, Tucson, AZ (US);
Michael Murphree, North Attleboro, MA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.