The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2009
Filed:
Nov. 21, 2006
Juan Carlos Rocha-alvarez, Sunnyvale, CA (US);
Thomas Nowak, Cupertino, CA (US);
Sanjeev Baluja, San Francisco, CA (US);
Andrzej Kaszuba, San Jose, CA (US);
Ndanka O. Mukuti, Santa Clara, CA (US);
Juan Carlos Rocha-Alvarez, Sunnyvale, CA (US);
Thomas Nowak, Cupertino, CA (US);
Sanjeev Baluja, San Francisco, CA (US);
Andrzej Kaszuba, San Jose, CA (US);
Ndanka O. Mukuti, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A pump liner is used to direct a laminar flow of purge gas across a workpiece to remove contaminants or species outgassed or otherwise produced by the workpiece during processing. The pump liner can take the form of a ring having a plurality of injection ports, such as slits of a variety of shapes and/or sizes, opposite a plurality of receiving ports in order to provide the laminar flow. The flow of purge gas is sufficient to carry a contaminant or outgassed species from the processing chamber in order to prevent the collection of the contaminants on components of the chamber. The pump liner can be heated, via conduction and irradiation from a radiation source, for example, in order to prevent the condensation of species on the liner. The pump liner also can be anodized or otherwise processed in order to increase the emissivity of the liner.