The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2009
Filed:
Dec. 16, 2005
Louis J. M. Selen, Eindhoven, NL;
Eric A. H. Timmermans, Portland, OR (US);
Gerrit Ten Bolscher, Tempe, AZ (US);
Louis J. M. Selen, Eindhoven, NL;
Eric A. H. Timmermans, Portland, OR (US);
Gerrit ten Bolscher, Tempe, AZ (US);
ASM International N.V., , NL;
Abstract
Particle contamination of semiconductor substrates due to particles coming off of wafer boat rods is reduced. A gas flow is established with the boat rods downstream of the substrates, to blow particles from the boat rods away from the substrates. The boat rods can also be placed upstream of the substrates in the gas flow, and a flow deflector is used to minimize the flow of gas contacting the boat rods, to reduce the amount of particles being blown off the rods. In addition, the gas flow can be below a rate at which particle generation is likely or can be at a sufficiently high rate to minimize the possibility of particles settling on the substrates.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile