The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2009
Filed:
Jun. 24, 2002
Applicants:
Ali Shajii, Canton, MA (US);
Nicholas Kottenstette, Newburyport, MA (US);
Jesse Ambrosina, Topsfield, MA (US);
Inventors:
Ali Shajii, Canton, MA (US);
Nicholas Kottenstette, Newburyport, MA (US);
Jesse Ambrosina, Topsfield, MA (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A mass flow controller includes a pressure sensor that senses pressure within the mass flow controller and displays the pressure. The pressure display may be local, mounted directly to the mass flow controller, or it may be connected through a link to the mass flow controller for remote display.