The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2009
Filed:
Aug. 10, 2005
Boris Yokhin, Nazareth Illit, IL;
Alexander Krokhmal, Haifa, IL;
Tzachi Rafaeli, Givat Shimshit, IL;
Isaac Mazor, Haifa, IL;
Amos Gvirtzman, Moshav Zippori, IL;
Boris Yokhin, Nazareth Illit, IL;
Alexander Krokhmal, Haifa, IL;
Tzachi Rafaeli, Givat Shimshit, IL;
Isaac Mazor, Haifa, IL;
Amos Gvirtzman, Moshav Zippori, IL;
Jordan Valley Semiconductord Ltd, Migdal Ha'Emek, IL;
Abstract
Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a first, converging beam of X-rays toward a surface of the sample and to direct a second, collimated beam of the X-rays toward the surface of the sample. A motion assembly moves the radiation source between a first source position, in which the X-rays are directed toward the surface of the sample at a grazing angle, and a second source position, in which the X-rays are directed toward the surface in a vicinity of a Bragg angle of the sample. A detector assembly senses the X-rays scattered from the sample as a function of angle while the radiation source is in either of the first and second source configurations and in either of the first and second source positions. A signal processor receives and processes output signals from the detector assembly so as to determine a characteristic of the sample.