The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2009
Filed:
Oct. 05, 2005
Shigehiko Fujimaki, Tokyo, JP;
Hiroshi Inaba, Yokohama, JP;
Hiroshi Ishizaki, Kanagawa, JP;
Hitachi Global Storage Technologies Netherlands B.V., Amsterdam, NL;
Abstract
To promote reduction in thickness of an air bearing surface protective film of a magnetic head, a magnetic head having an air bearing surface protective film consisting only of a thin carbon film while excluding formation of a dead layer by ion incidence as less as possible to the read/write device, and a manufacturing method therefore, are provided. In an embodiment, an air bearing surface protective film of a magnetic head comprises a thin carbon film, in which the mass density a lowermost layer of the air bearing surface protective film on the side of a magnetic device is made lower compared with a thin carbon film constituting other adjacent layers. Further, the manufacturing method comprises deposition under the control of time for the incident angle of ion flow to a substrate to be processed and deposition under the control of time for the ion flow energy to a substrate to be processed.