The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2009
Filed:
Mar. 23, 2005
Applicants:
Ronald Thomas Bertram, Gilbert, AZ (US);
Douglas Michael Scott, Gilbert, AZ (US);
Inventors:
Ronald Thomas Bertram, Gilbert, AZ (US);
Douglas Michael Scott, Gilbert, AZ (US);
Assignee:
Tokyo Electron Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 35/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method and apparatus for removing contaminants from a fluid are disclosed. The fluid is introduced into a decontamination chamber such that the fluid is cooled and contaminants fall out within the decontamination chamber, producing a purified fluid. The purified fluid is then retrieved and can be used in a supercritical processing system.