The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2009
Filed:
Aug. 29, 2006
Richard E. Church, Rochester, NY (US);
Richard E. Church, Rochester, NY (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
A power generation system including a RF power generator which provides a RF output power. The power distribution system includes a phase-magnitude detector module having a dual logarithmic amplifier phase-magnitude detector. The dual logarithmic amplifier phase-magnitude detector receives current and voltage signals. The dual logarithmic amplifier phase-magnitude detector generates a phase signal that varies in accordance with the phase between the voltage signal and the current signal and a magnitude signal that varies in accordance with the magnitude between the voltage and current signals. A controller receives the phase and magnitude signal and communicates control signals to the matching network.