The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2009
Filed:
Oct. 11, 2007
Applicant:
Henry A. Hill, Tucson, AZ (US);
Inventor:
Henry A. Hill, Tucson, AZ (US);
Assignee:
Zygo Corporation, Middlefield, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
In general, in one aspect, the invention features an apparatus including a multi-axis interferometer configured to produce at least three output beams each including interferometric information about a distance between the interferometer and a measurement object along a corresponding measurement axis, wherein at least three of the measurement axes are in a common plane, wherein the output beams each include a component that makes a pass to the measurement object along a common beam path.