The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2009
Filed:
Mar. 15, 2007
William Clay Schluchter, Los Altos, CA (US);
Miao Zhu, San Jose, CA (US);
Geraint Owen, Palo Alto, CA (US);
Alan B. Ray, Palo Alto, CA (US);
Carol J. Courville, San Jose, CA (US);
William Clay Schluchter, Los Altos, CA (US);
Miao Zhu, San Jose, CA (US);
Geraint Owen, Palo Alto, CA (US);
Alan B. Ray, Palo Alto, CA (US);
Carol J. Courville, San Jose, CA (US);
Agilent Technologies, Inc., Santa Clara, CA (US);
Abstract
A displacement measurement apparatus includes a light source, a splitter grating, a measurement grating, and first a second detector arrays. The splitter grating splits a light beam into first and second measurement channels that each illuminates the measurement grating. The first and second measurement channels split into 0and 1order diffraction products at the measurement grating in a first pass and recombine at the measurement grating in a second pass before being measured at the first and second detector arrays.