The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2009
Filed:
Dec. 19, 2006
Tadashi Ikejiri, Kyoto, JP;
Tadashi Ikejiri, Kyoto, JP;
Nissin Ion Equipment Co., Ltd., Kyoto, JP;
Abstract
An ion beam irradiating apparatus has: a beam profile monitorwhich measures a beam current density distribution in y direction of an ion beamin the vicinity of a targetmovable shielding plate groupsrespectively having plural movable shielding plateswhich are arranged in the y direction so as to be opposed to each other across an ion beam path on an upstream side of the position of the target, the movable shielding plates being mutually independently movable in x direction; shielding-plate driving deviceswhich reciprocally drive the movable shielding platesconstituting the groups, in the x direction in a mutually independent manner; and a shielding-plate controlling devicewhich, on the basis of measurement information obtained by the monitorcontrols the shielding-plate driving devicesto relatively increase an amount of blocking the ion beamby the opposed movable shielding plateswhich correspond to a position where a measured y-direction beam current density is relatively large, thereby uniformity of the beam current density distribution in the y direction.