The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2009
Filed:
Jun. 21, 2005
Hernes Jacobs, Eindhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Petrus Matthijs Henricus Vosters, Bladel, NL;
Bernardus Antonius Johannes Luttikhuis, Nuenen, NL;
Hernes Jacobs, Eindhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Petrus Matthijs Henricus Vosters, Bladel, NL;
Bernardus Antonius Johannes Luttikhuis, Nuenen, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A substrate handler for moving a substrate relative to a substrate table of a lithographic apparatus. The substrate handler comprises at least one support surface or platform adapted to carry a plurality of independent substrates simultaneously. The substrate handler adapted to load substrates onto and unload substrates from the substrate table before and after exposure.