The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2009
Filed:
Jun. 29, 2005
Jirou Matsuo, Chiba, JP;
Kiyofumi Takano, Chiba, JP;
Yusuke Takano, Kakegawa, JP;
Yasushi Akiyama, Kakegawa, JP;
Jirou Matsuo, Chiba, JP;
Kiyofumi Takano, Chiba, JP;
Yusuke Takano, Kakegawa, JP;
Yasushi Akiyama, Kakegawa, JP;
Dainippon Ink and Chemicals, Inc., Tokyo, JP;
AZ Electronic Materials (Japan) K.K., Tokyo, JP;
Abstract
The object of the present invention is to provide an anti-reflective coating composition having excellent coating properties while maintaining performance as an anti-reflective film. An anti-reflective coating composition comprising at least the following components (A), (B), (C), (D), and (E) and a production method for a pattern using the anti-reflective coating composition, (A) perfluoroalkyl•alkylenesulfonic acid represented by the following formula (1): CF(CHCH)SOH (1) (wherein, n represents an integer from 1 to 20, and m represents an integer from 0 to 20); (B) organic amine; (C) water-soluble polymer; (D) perfluoroalkylethyl group containing compound represented by the following formula (2): CFCHCH—X—Y (2) (wherein, k represents an integer from 1 to 20, x represents a single bond or a divalent linking group, y represents an anionic group or a nonionic group, and this compound has a structure different from that of the component (A)); and (E) water.