The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2009
Filed:
Dec. 20, 2005
Yuichi Nasu, Hiratsuka, JP;
Kazuhiro Narahara, Hiratsuka, JP;
Yuichi Nasu, Hiratsuka, JP;
Kazuhiro Narahara, Hiratsuka, JP;
Sumco Techxiv Corporation, Hiratsuka-shi, JP;
Abstract
An oxide filmon the surface of the substrateand an inner wall oxide filmin a COPexposed to the surface of the substrateare removed by cleaning the surface of the substratewith a hydrofluoric acid solution. The substrateis then cleaned with ozone water, thereby forming an oxide filmon the surface of the substrate. Thereafter the substrateis subjected to a heat treatment for removing the oxide filmon the surface of the substrate. Consequently, the COPon the surface of the substrateis planarized to be eliminated from the substrate surface. Thereafter an epitaxial layeris formed on the surface of the substrate