The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2009
Filed:
Nov. 06, 2007
Carsten Strietzel, Osterreich, AT;
Per Björkman, Aland, FI;
Walter Berner, Schweiz, CH;
Inficon GmbH, Bad Ragaz, CH;
Abstract
Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm () at a spacing a first housing plate () is disposed sealing in the margin region with a joining means (), and that on the other side of the diaphragm () at a spacing a second housing plate () is disposed sealing in the margin region with a joining means (), and that the second housing plate () has an opening at which a connection means () is disposed sealing with joining means () for the connection of the measuring cell () with the medium to be measured, wherein the diaphragm () and the two housing plates () are comprised of a metal oxide. Using an ALD method, the measuring cell is coated in a vacuum chamber (), in particular through the opening of the measuring cell, such that the inner wall of the measuring vacuum chamber () and the opening with the connection means () is covered with a protective layer () such that at least the joining means () for the diaphragm () is protectively covered against corrosion.