The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2009

Filed:

Jan. 18, 2006
Applicants:

Peter Andrews, Beaverton, OR (US);

David Hess, Beaverton, OR (US);

Robert New, Beaverton, OR (US);

Inventors:

Peter Andrews, Beaverton, OR (US);

David Hess, Beaverton, OR (US);

Robert New, Beaverton, OR (US);

Assignee:

Cascade Microtech, Inc., Beaverton, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A system includes an imaging device suitable for effectively positioning a probe for testing a semiconductor wafer. The system includes an objective lens for sensing the device under test and an imaging device sensing a first video sequence including multiple frames of an overlapping region of the device under test. A video signal is provided to a display including multiple frames of the overlapping region of the device under test. An operator indicating a region of the video signal of devices under test and the system in response presenting an enlarged view of a plurality of different regions of the device under test in a plurality of windows free from user input, where the region and the plurality of different regions are simultaneously displayed on the display.


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