The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2009
Filed:
Mar. 31, 2005
Applicants:
Hideshi Miyajima, Kanagawa, JP;
Keiji Fujita, Kanagawa, JP;
Hideaki Masuda, Kanagawa, JP;
Rempei Nakata, Kanagawa, JP;
Miyoko Shimada, Ibaraki, JP;
Inventors:
Hideshi Miyajima, Kanagawa, JP;
Keiji Fujita, Kanagawa, JP;
Hideaki Masuda, Kanagawa, JP;
Rempei Nakata, Kanagawa, JP;
Miyoko Shimada, Ibaraki, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract
The formation of an interlayer insulating film above a substrate, the formation of an insulating film of an organic material on the interlayer insulating film thereafter, and the irradiation of the insulating film of an organic material and the interlayer insulating film with electron beams, thereby curing at least the insulating film of an organic material, are proposed.