The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2009
Filed:
Mar. 29, 2002
Makoto Hanabata, Kyoto, JP;
Masahiro Sato, Kyoto, JP;
Junko Katayama, Kyoto, JP;
Satsuki Kitajima, Kyoto, JP;
Atsushi Niwa, Kyoto, JP;
Makoto Hanabata, Kyoto, JP;
Masahiro Sato, Kyoto, JP;
Junko Katayama, Kyoto, JP;
Satsuki Kitajima, Kyoto, JP;
Atsushi Niwa, Kyoto, JP;
Osaka Gas Company Limited, Osaka, JP;
Abstract
A photoactive compound is used in combination with a photosensitizer, represented by the following formula (1):A-[(J)-(X-Pro)]  (1)wherein A represents a hydrophobic unit comprising at least one kind of hydrophobic groups selected from a hydrocarbon group and a heterocyclic group, J represents a connecting group, X-Pro represents a hydrophilic group protected by a protective group Pro which is removable by light exposure, m represents 0 or 1, and n represents an integer of not less than 1. The protective group Pro may be removable by light exposure in association with the photosensitizer (especially, a photo acid generator), or may be a hydrophobic protective group. The hydrophilic group may be a hydroxyl group or a carboxyl group. The photoactive compound has high sensitivity to a light source of short wavelength beams, for resist application, therefore, the photoactive compound is advantageously used for forming a pattern with high resolution.