The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2009
Filed:
Mar. 14, 2007
Mark W. Curry, Morgan Hill, CA (US);
Sebastien Raoux, Santa Clara, CA (US);
Peter Porshnev, San Jose, CA (US);
Mark W. Curry, Morgan Hill, CA (US);
Sebastien Raoux, Santa Clara, CA (US);
Peter Porshnev, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In one aspect, improved methods and apparatus for pressure control in an electronic device manufacturing system are provided. The method includes acquiring information related to a current state of the electronic device manufacturing system, determining a desired value of a first parameter of the electronic device manufacturing system based on the acquired information and adjusting at least one parameter of a pump to obtain the desired value of the first parameter of the electronic device manufacturing system.