The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2009
Filed:
Jan. 16, 2007
Applicant:
Tsutomu Hayakawa, Chuo-ku, JP;
Inventor:
Tsutomu Hayakawa, Chuo-ku, JP;
Assignee:
Elpida Memory, Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G11C 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A composite plugis formed, and both a first plug (TiN)and a second plug (W)are disposed in one contact hole; the first plug (TiN)functions as a heater electrode and the second plug (W)functions as a contact plug. This eliminates the need to stack the heater electrode on the contact plug. The resistivities Rand Rof the first and second plugs of the composite plugare in a relationship R>R