The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2009
Filed:
Jun. 13, 2006
Sug-woo Jung, Gyeonggi-do, KR;
Gil-heyun Choi, Gyeonggi-do, KR;
Byung-hee Kim, Seoul, KR;
Jong-ho Yun, Gyeonggi-do, KR;
Hyun-su Kim, Gyeonggi-do, KR;
Eun-ji Jung, Gyeonggi-do, KR;
Sug-woo Jung, Gyeonggi-do, KR;
Gil-heyun Choi, Gyeonggi-do, KR;
Byung-hee Kim, Seoul, KR;
Jong-ho Yun, Gyeonggi-do, KR;
Hyun-su Kim, Gyeonggi-do, KR;
Eun-ji Jung, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Abstract
Methods of forming a metal salicide layer can include forming a metal layer on a substrate and forming a metal silicide layer on the metal layer using a first thermal process at a first temperature. Then a second process is performed, in-situ with the first thermal process, on the metal layer at a second temperature that is less than the first temperature.