The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2009
Filed:
May. 03, 2006
Minfan Pai, Los Altos, CA (US);
Minfan Pai, Los Altos, CA (US);
Discera, Inc., Ann Arbor, MI (US);
Abstract
A device and method for fabricating the device is disclosed. The device includes a substrate having an active layer disposed on a sacrificial layer. A trench is formed in the active layer to electrically isolate first and second regions in the active layer, and a non-conductive material is deposited on the substrate such that the non-conductive material fills the trench to form a substantially planar surface for support of further components of the device. In some cases, the non-conductive material fills only a portion of the trench sufficient to form the substantially planar surface. The non-conductive material may include silicon nitride.