The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2009
Filed:
May. 31, 2006
Hitoshi Inaba, Sagamihara, JP;
Masaharu Fujino, Sendai, JP;
Yasuhiko Fukuchi, Sendai, JP;
Kazuyoshi Nakajima, Nagaokakyo, JP;
Masato Kochi, Ichikawa, JP;
Hitoshi Inaba, Sagamihara, JP;
Masaharu Fujino, Sendai, JP;
Yasuhiko Fukuchi, Sendai, JP;
Kazuyoshi Nakajima, Nagaokakyo, JP;
Masato Kochi, Ichikawa, JP;
Future Vision Inc., Tokyo, JP;
Abstract
The present invention provides a charge neutralizer for accurately irradiating a soft X ray into a narrow gap after a glass substrate is lifted up. A soft X ray is introduced into a gap 'd' from a soft X ray charge neutralizer, and the soft X ray is detected by a soft X ray optical axis monitor. Mounting position adjusting meansis adjusted by a detection output from said soft X ray optical axis monitor, and optical axis alignment is performed. Next, according to information from a database, a control unitcontrols gap adjusting means, and charge neutralization is performed. Charge neutralization can also be performed by controlling the gap 'd' by the gap adjusting meanswhile judging neutralizing conditions as to whether a charged potential measured by an electrometeris within an allowable value by the control unitor not.