The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2009

Filed:

Aug. 26, 2005
Applicants:

Ko-hsing Chang, Hsinchu, TW;

Chiu-tsung Huang, Hsinchu, TW;

Inventors:

Ko-Hsing Chang, Hsinchu, TW;

Chiu-Tsung Huang, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/788 (2006.01); H01L 29/76 (2006.01);
U.S. Cl.
CPC ...
Abstract

A non-volatile memory is provided. An assist gate structure is formed on a substrate such that the width at the bottom of the assist gate structure is greater than the width at the top of the assist gate structure. A floating gate is formed on one side of the assist gate structure and disposed between a word line and the substrate. The width at the bottom of the floating gate is smaller than the width at the top of the floating gate. The word line, the floating gate and the assist gate structure together form a memory unit. A tunneling dielectric layer is formed between the floating gate and the substrate. An inter-gate dielectric layer is formed between the word line, the floating gate and the assist gate structure. Source/drain regions are formed in the substrate on the respective sides of the memory unit.


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