The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2009
Filed:
Feb. 28, 2003
Applicants:
Takanori Saito, Tokyo-To, JP;
Kenichi Yamaga, Tokyo-To, JP;
Inventors:
Takanori Saito, Tokyo-To, JP;
Kenichi Yamaga, Tokyo-To, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F27B 5/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
A heat treating device () has a cooling sleeve that covers a treating vessel () and a heater (). The cooling sleeve has a cylindrical base member () and a cooling pipe () spirally wound on the outer peripheral surface hereof. The cooling pipe () is brazed to the base member ().