The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2009
Filed:
Jun. 13, 2005
Applicants:
Tsuyoshi Ohtsuki, Gunma, JP;
Hideki Sato, Gunma, JP;
Inventors:
Tsuyoshi Ohtsuki, Gunma, JP;
Hideki Sato, Gunma, JP;
Assignee:
Shin-Etsu Handotai Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus for evaluating an electric characteristic of a semiconductor wafer including, at least, a wafer cassette section on which a wafer cassette for storing the semiconductor wafer that is an object to be evaluated is placed, a wafer pretreatment section for pretreating the semiconductor wafer in order to evaluate the electric characteristic thereof, a mercury probe section for evaluating the electric characteristic of the semiconductor wafer by using a mercury probe, and an automatic transport part for transporting the semiconductor wafer to each of the sections.