The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2009
Filed:
May. 27, 2005
Jun Kawahara, Tokyo, JP;
Keizo Kinoshita, Tokyo, JP;
Nobutaka Kunimi, Ibaraki, JP;
Akinori Nakano, Tokyo, JP;
Jun Kawahara, Tokyo, JP;
Keizo Kinoshita, Tokyo, JP;
Nobutaka Kunimi, Ibaraki, JP;
Akinori Nakano, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
A copolymerized high polymer film includes plural organic polymers, as skeleton, and is manufactured by blowing more than two kinds of organic monomers of respectively specific structures, in a vapor phase condition, onto the surface of a heated substrate, through plasma being generated in a reaction chamber. As a result, manufacture of an organic high polymer film capable of further reducing the effective relative permittivity of organic polymer films as a whole can be achieved, and, at the same time, further improvement in mechanical strength of film as well as film forming speed can be achieved.