The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2009
Filed:
Nov. 10, 2005
Ichiro Mizushima, Yokohama, JP;
Masayuki Tanaka, Yokohama, JP;
Katsuaki Natori, Yokohama, JP;
Yoshio Ozawa, Yokohama, JP;
Seiji Inumiya, Tsukuba, JP;
Katsuyuki Sekine, Yokohama, JP;
Tetsuya Kai, Yokohama, JP;
Ichiro Mizushima, Yokohama, JP;
Masayuki Tanaka, Yokohama, JP;
Katsuaki Natori, Yokohama, JP;
Yoshio Ozawa, Yokohama, JP;
Seiji Inumiya, Tsukuba, JP;
Katsuyuki Sekine, Yokohama, JP;
Tetsuya Kai, Yokohama, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A method of forming an insulating film includes forming a base film comprising a material whose surface is oxidized by being exposed to an oxidant. A source gas containing a metal material and a first oxidant having a first oxidation force are alternately supplied to form a first insulating film on the base film. A source gas containing a metal material and a second oxidant having a second oxidation force stronger than the first oxidation force are alternately supplied to form a second insulating film on the first insulating film.