The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2009
Filed:
Feb. 09, 2006
Charles H. Wallace, Portland, OR (US);
Swaminathan Sivakumar, Portland, OR (US);
Shannon E. Daviess, Hillsboro, OR (US);
Charles H. Wallace, Portland, OR (US);
Swaminathan Sivakumar, Portland, OR (US);
Shannon E. Daviess, Hillsboro, OR (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
Cross-shaped sub-resolution assist features may be utilized to print lithographic patterns in semiconductor fabrication processes. The crosses may be isolated structures or may be part of a grid arrangement. The main features, such as contacts, may be positioned on the mask so as to be intersected by the cross-shaped sub-resolution assist features. In some embodiments, the cross-shaped sub-resolution assist features may intersect the main feature at its center point in both the x and y directions.