The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2009
Filed:
Nov. 21, 2003
Andrew Douglas Bankhead, Leicester, GB;
Ian Lee-bennett, Leicester, GB;
Ivor Mcdonnell, Leicester, GB;
Andrew Douglas Bankhead, Leicester, GB;
Ian Lee-Bennett, Leicester, GB;
Ivor McDonnell, Leicester, GB;
Taylor Hobson Limited, Leicester, GB;
Abstract
Light is directed along a sample path towards the sample surface and along a reference path towards a reference surface such that light reflected by the sample surface and light reflected by the reference surface interfere. Relative movement is effected between the sample surface and the reference surface along a measurement path and the light intensity resulting from interference between light reflected from the reference surface and regions of the sample surface is sensed at intervals along the measurement path to provide a number of sets of light intensity data values with each light intensity data value representing the sensed light intensity associated with a corresponding one of said regions. The sets of light intensity data are processed to determine a position along the measurement path at which a predetermined feature occurs in the light intensity data for each sensed region and to enhance image data representing the intensity data to facilitate the detection by a user of the interference fringes.