The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2009

Filed:

Jun. 13, 2007
Applicants:

Christian Rembe, Waldbronn, DE;

Bernd Armbruster, Karlsruhe, DE;

Inventors:

Christian Rembe, Waldbronn, DE;

Bernd Armbruster, Karlsruhe, DE;

Assignee:

Polytec GmbH, Waldbronn, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/00 (2006.01); G01B 11/24 (2006.01); G01B 9/02 (2006.01); H01J 3/14 (2006.01);
U.S. Cl.
CPC ...
Abstract

A scanning microscope for the optical measuring of an object in which a measurement beam emitted by the light source impinges the object and is reflected by the object as a reflection beam that reenters through the lens into the radiation path of the microscope. A scanner control unit controls a displacement to change the relative position of the object and the measuring beam so that the beam is directed to at least two different measuring points on the object. An excitation unit periodically excites the object. The reflection beam is visualized on a signal detector, and a signal storage unit saves a measuring sequence of signals of the signal detector. The scanner control unit cooperates with the excitation and signal storage units to control them such that for each measuring point on the object at least one measuring sequence of measuring signals of the signal detector is saved.


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