The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2009
Filed:
Apr. 04, 2006
Hidekazu Matsushita, Kagoshima, JP;
Tsuyoshi Katoh, Kagoshima, JP;
Satoshi Doi, Kagoshima, JP;
Akitoshi Maeda, Kagoshima, JP;
Hidekazu Matsushita, Kagoshima, JP;
Tsuyoshi Katoh, Kagoshima, JP;
Satoshi Doi, Kagoshima, JP;
Akitoshi Maeda, Kagoshima, JP;
NEC LCD Technologies, Ltd., Kanagawa, JP;
Abstract
A method for manufacturing a TFT panel of an LCD device includes the steps of wet etching a multilayer metallic structure including a high-melting-point metal film (HMPM) film, Al film and another HMPM film while using side etching technique by using a photoresist mask, hot-water washing the side walls of the Al film after the wet etching, and dry etching for configuring the channel region of a TFT in each pixel, and removing the photoresist mask. The presence of the photoresist mask and the protection film prevents corrosion of Al caused by plasma of the etching gas in the dry etching.