The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2009
Filed:
Sep. 17, 2007
Applicants:
Adlai H. Smith, Escondido, CA (US);
Robert O. Hunter, Jr., San Diego, CA (US);
Inventors:
Adlai H. Smith, Escondido, CA (US);
Robert O. Hunter, Jr., San Diego, CA (US);
Assignee:
Litel Instruments, San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/62 (2006.01); G03B 27/52 (2006.01); G03B 27/42 (2006.01); G03B 27/68 (2006.01);
U.S. Cl.
CPC ...
Abstract
An in-situ interferometer includes an image modifying optic that produces light ray bundles. The light ray bundles are projected onto a reticle with a plurality of measurement fiducials encoded onto a face of the reticle. The measurement fiducials are exposed onto a sensing plane and their locations measured. Aberrations in the projection system are determined from the measurements of the exposed reticles.