The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2009
Filed:
Sep. 29, 2006
Benyamin Buller, Cupertino, CA (US);
William J. Devore, Hayward, CA (US);
Juergen Frosien, Reimerling, DE;
Richard L. Lozes, Pleasanton, CA (US);
Henry Pearce-percy, Los Gatos, CA (US);
Dieter Winkler, Munich, DE;
Benyamin Buller, Cupertino, CA (US);
William J. Devore, Hayward, CA (US);
Juergen Frosien, Reimerling, DE;
Richard L. Lozes, Pleasanton, CA (US);
Henry Pearce-Percy, Los Gatos, CA (US);
Dieter Winkler, Munich, DE;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Methods and apparatus to facilitate the measurement of the amount of scattered electrons collected by an anti-fogging baffle arrangement are provided. For some embodiments, by affixing a lead to an electrically isolated (floating) portion of the baffle arrangement, the amount of scattered electrons collected thereby may be read out, for example, as a current signal. Thus, for such embodiments, the baffle arrangement may double as a detector, allowing an image of surface (e.g., a mask or substrate surface) to be generated.